[20a-P4-1~71] 17 Nanocarbon Technology（Poster）

[20a-P4-29] Fabrication of graphene nano-disks by bi-layer resist and analysis of their optical properties

〇Syuutarou Ishida¹, Takashi Shintaku¹, Keiji Sasaki¹ (1.RIES, Hokkaido Univ.)

Keywords:graphene,nano-structure,optical property

We have developed the graphene nano-disk fabrication process with (HSQ/PMMA) bi-layer resist. This process can decrease the residue of the resist on graphene nano-disk and reduce the size of them. In this paper, we demonstrate the size and shape of the device and optical properties of graphene nano-disks.