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[20a-W810-1] Reduction of a Beam Diameter Formed by Several Hundred keV Compact Ion Microbeam System (Ⅱ)
Keywords:ion microbeam system
A several hundred keV ion microbeam system has been constructed in JAEA. In the present study the formation of 1 μm diameter ion microbeam is attempted at 120 keV. A 6 μm diameter ion microbeam was already formed using the microbeam system. To know the direction of the ion microbeam system improvement for the beam diameter reduction, an ion beam was experimentally formed by making a shorter distance between the anode and the extraction electrode in the ion source of the microbeam system than the former distance. The 3 μm diameter ion microbeam was formed as a result, which showed the direction of the system improvement.