Laser Irradiation to Self-Standing Super-DLC Film Prepared by Water-Soluble Sacrificial Layer Dissolution

Toru Harigai; Yu Miyamoto; Masafumi Yamano; Yoshiyuki Suda; Hirofumi Takikawa; Takeshi Kawano; Masao Kamiya; Makoto Taki; Yushi Hasegawa; Nobuhiro Tsuji; Mamiko Nishiuchi; Hironao Sakaki; Kiminori Kondo; Satoru Kaneko

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20p-H103-1~21] 6.2 Carbon-based thin films

Sun. Mar 20, 2016 1:15 PM - 7:00 PM H103 (H)

Masami Aono(National Defence Academy), Takako Nakamura(AIST), Atsuhito Sawabe(Aoyama Gakuin Univ.)

4:45 PM - 5:00 PM

△ [20p-H103-14] Laser Irradiation to Self-Standing Super-DLC Film Prepared by Water-Soluble Sacrificial Layer Dissolution

〇Toru Harigai¹, Yu Miyamoto¹, Masafumi Yamano¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Takeshi Kawano¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Nobuhiro Tsuji³, Mamiko Nishiuchi⁴, Hironao Sakaki⁴, Kiminori Kondo⁴, Satoru Kaneko⁵ (1.Toyohashi Univ. Technol., 2.Itoh Opt. Ind. Co., Ltd., 3.Onward Ceram. Coat. Co., Ltd., 4.JAEA, 5.Kanagawa Ind. Technol. Center)

Keywords:DLC,laser,film target