[20p-P12-1~31] 12.7 Biomedical Engineering and Biochips

[20p-P12-29] Low temperature solution-processed lead-zirconium-titanate thin film actuator for highly integrated biochip

〇(P)TUE TRONG PHAN^1,2, Reijiro Shimura^1,2, Yuki Tagashira¹, Yoshiaki Ukita^2,3, Keisuke Satou⁴, Kazuhiro Fukada^1,2, Tatsuya Shimoda^1,2, Yuzuru Takamura^1,2 (1.JAIST, 2.JST-CREST, 3.Yamanashi Uni., 4.JSR)

Keywords:piezoelectric actuator,PZT film,Low temperature solution processing

The goal of this research is to build the technical base for single cells analysis on 2D plane, such as tissue surfaces, sections, and cultured cell networks, by developing the array of cell-analysis-units constructed with micro actuators.
For this purpose, we are developing on-chip lead zirconium titanate (PZT) thin film actuators by solution process at low temperature (450 degree celcius), which are expected to enable low-cost large-area fabrication of active devices by printing of functional Ink (solution). In this work, as a primary step, a thin film actuator made of low temperature solution-processed PZT was fabricated and its properties were evaluated.