[20p-P4-1~19] 3.11 Photonic structures and phenomena

[20p-P4-6] Fabrication of high Q low-refractive-index silica zipper cavity

〇Tomohiro Tetsumoto¹, Hajime Kumazaki¹, Kentaro Furusawa², Norihiko Sekine², Akifumi Kasamatsu², Takasumi Tanabe¹ (1.Keio Univ., 2.NICT)

Keywords:Photonic crystal,optical micro- and nanocavity,Cavity opto-mechanics

In the field of quantum information processing, photonic crystal nanocavities for the visible range are required. However, it is difficult to design them with low-refractive-index materials such as silica and silicon nitride which are transparent in the visible. On the other hand, most of devices for cavity opto-mechanics are fabricated with silicon nitride which has high Young’s module. However, the number of applications using comparatively soft materials like silica are limited. In this study, we fabricated silica zipper cavity and successfully obtained high Q of 2.7×10³ in the visible range.