[20p-P4-1~19] 3.11 Photonic structures and phenomena

[20p-P4-9] Sensitivity of Nanomechanical Resonator with Gold Nano-Fin Array for Wavelength Detection

〇Etsuo Maeda¹, Reo Kometani¹ (1.Univ. of Tokyo)

Keywords:plasmonics,nanomechanical resonator

For the purpose of cost reduction in the WDM component, we had proposed opto-nanomechanical resonator as a wavelength detection device. Our photonic absorber on nanomechanical resonator was consisted of gold nano-fin array to absorb near infrared light wave which is used in WDM component. The absorbed light wave is translated to thermal stress in the nanomechanical resonator. The minute difference in the illuminated wavelength or power can be measured as the difference in the resonant frequency of nanomechanical resonator. Through our study, the estimated wavelength resolution was 0.2 pm and the estimated power resolution was 0.05 nW with our fabricated opto-nanomehcanical resonator.