[20p-P7-1~20] 9.2 ナノワイヤ・ナノ粒子

▲ [20p-P7-6] Si Nanowire Formation using Al-Catalyst with Various Substrate Temperatures

〇Jevasuwan Wipakorn¹、Fukata Naoki¹ (1.NIMS)

キーワード：Nanowire,Silicon,Al-catalyst

Nanowires (NWs) have significantly attracted attention as building blocks for next generation devices including solar cells and field-effect transistors (FETs). VLS mechanism of chemical-vapor-deposition (CVD) technique suggests that the NW formation starts from the vapor phase diffusion through the liquid catalyst droplet and end up as solid wire. Owning to Au properties of nontoxicity, chemical stability, unoxidation in air, Au-catalyzed NW formations have already been reported. However, they are difficult to realize high performance devices due to Au contamination. In this study, we would like to propose Al which has been recently proposed as a new alternative catalyst to form SiNWs for solar cell and FET applications.