[20p-P9-1~22] 13.8 Compound and power electron devices and process technology

[20p-P9-1] Fabrication and characterization of AlGaN-based PIN type UV photodiodes with surface recessed electrode structures

〇Mayuko Okada¹, Yuta Miyachi¹, Makoto Miyoshi¹, Takashi Egawa¹ (1.Nagoya Institute of Technology)

Keywords:semiconductor,photodiode