1:30 PM - 3:30 PM
[20p-P9-10] Electrical Characterization of n-GaN Films Treated by CF4 Plasma
Keywords:nitride semconductor,plasma damage,CF4
Poster presentation
13 Semiconductors » 13.8 Compound and power electron devices and process technology
Sun. Mar 20, 2016 1:30 PM - 3:30 PM P9 (Gymnasium)
1:30 PM - 3:30 PM
Keywords:nitride semconductor,plasma damage,CF4