[20p-P9-1~22] 13.8 化合物及びパワー電子デバイス・プロセス技術

▲ [20p-P9-11] Fabrication of GaN Porous Structures Using Photo-Electrochemical Etching and Electrode Response

〇張 笑逸¹、伊藤 圭亮¹、喜田 弘文¹、熊崎 祐介¹、佐藤 威友¹ (1.北大量集センター)

キーワード：Porous Structures,Photo-Electrochemical Etching

High-density nanostructures of GaN have been widely investigated for highly-electrochemical responses in chemical sensors, photoelectrodes and so on. Porous structure is one of the attractive nanostructures with the merit of high productivity over a large area and low damages during etching. In this study, the fabrication of porous structures by the electrochemical etching is reported and the electrochemical response of porous electrodes is measured as well.