[20p-S011-9~20] 17.2 Graphene

△ [20p-S011-20] Effects of gas residue on graphene synthesis by plasma CVD

〇Yuki Okigawa^1,2, Ryuichi Kato², Takatoshi Yamada^1,2, Masatou Ishihara^1,2, Masataka Hasegawa^1,2 (1.AIST, 2.TASC)

Keywords:graphene,plasma CVD,gas residue