The 63rd JSAP Spring Meeting, 2016

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Joint Session K » Joint Session K

[20p-S222-1~17] 21.1 Joint Session K

Sun. Mar 20, 2016 1:00 PM - 5:30 PM S222 (S2)

Naoki Ohashi(NIMS), Hisao Makino(Kochi Univ. of Tech.)

2:15 PM - 2:30 PM

[20p-S222-6] Solid-phase crystallization of amorphous undoped/V-doped ZnO stacked film on c-face sapphire using thermal annealing

〇Akihiro Watanabe1, Shoya Usui2, Tomoyuki Kawashima1, Katsuyoshi Washio1 (1.Tohoku Univ., 2.Tohoku University)

Keywords:Zinc Oxide,RF magnetron sputter,Solid-phase crystallization