The 63rd JSAP Spring Meeting, 2016

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Oral presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

[20p-S322-1~17] 1.6 Ultrasonics

Sun. Mar 20, 2016 1:45 PM - 6:15 PM S322 (S3)

Jun Kondoh(Shizuoka Univ.), Mami Matsukawa(Doshisha Univ.)

1:45 PM - 2:00 PM

[20p-S322-1] [Young Scientist Presentation Award Speech] Polarity inverted multilayered ZnO and ScAlN films and piezoelectric device applications

〇Takeshi Mori1, Masashi Suzuki2, Takahiko Yanagitani2 (1.Nagoya Inst. Tech., 2.Waseda Univ.)

Keywords:ScAlN,ZnO,Piezoelectric device