[20p-S322-1~17] 1.6 Ultrasonics

[20p-S322-12] Loss Reduction of Leaky SAW by Loading with High-velocity Thin Film

〇Shoji Kakio¹, Shinsuke Katsutani¹, Keiko Hosaka¹ (1.Univ. of Yamanashi)

Keywords:leaky SAW,AlN thin film,LiTaO3

The propagation properties of a leaky surface acoustic wave (LSAW) on rotated Y-cut X-propagating LiTaO₃ (LT) substrates loaded with an aluminum nitride (AlN) thin film with a higher phase velocity than that of the substrate were investigated theoretically and experimentally. For 0°YX-LT samples, the measured insertion loss and propagation loss were markedly reduced by loading with the AlN thin film.