Development of monitoring method for morphology change of metal thin film using antenna transmission non-contact piezoelectric sensor

Presentation information

Oral presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

Sun. Mar 20, 2016 1:45 PM - 6:15 PM S322 (S3)

Jun Kondoh(Shizuoka Univ.), Mami Matsukawa(Doshisha Univ.)

6:00 PM - 6:15 PM

〇Yuichiro Shiraiwa¹, Shun Hashizato¹, Nobutomo Nakamura¹, Hirotsugu Ogi¹, Masahiko Hirao¹ (1.Osaka Univ.)

Keywords:metal thin film,morphology change,monitoring