[20p-W323-1~14] CS.5 9.4熱電変換,16.2エナジーハーベスティングのコードシェアセッション

[20p-W323-6] フォノニック結晶におけるネック効果による熱伝導率の低減

〇柳澤 亮人¹、アヌフリエフ ロマン¹、メール ジェレミ¹、野村 政宏^1,2,3 (1.東大生研、2.ナノ量子機構、3.JSTさきがけ)

キーワード：熱伝導、ナノ構造、シリコン

Thermal phonon transport in nanostuructures was investigated. Silicon phononic crystals (PnCs) composed of nano beam structure with periodic hole array were fabricated and measured thermal conductivities by thermo-refrectance method. From a particle point of view, phonons have a wide range of mean free path (MFP) and heat is carried by all phonons. We observed neck effect in which long MFP phonons are strongly scattered at the narrowest part in structures, and large hole structures which have small neck showed reduced thermal conductivities even in long period structures which have less holes. This neck size dependence of thermal conductivity will help design of the PnC thermoelectric divices.