[20p-W641-1~9] State-of-the-art characterization technique of dielectric and ferroelectric materials

[20p-W641-7] Advanced AFM measurement for Electrical Characterization

〇Ishii Koji¹ (1.Oxford Instruments)

Keywords:Atomic Force Microscopy,electric characterization,ferroelectric

Electric characterizations on dialectic and ferroelectric sample have been improved using Atomic Force Microscopy with conductive cantilever. Advanced imaging and spectroscopy techniques based on conductivity, surface potential, piezo response and permittivity, also have been applied on various materials. In this talk, advanced AFM electrical measurement modes and applications are introduced.