[20p-W641-1~9] State-of-the-art characterization technique of dielectric and ferroelectric materials

[20p-W641-9] Direct and Converse piezoelectric measurements of thin films

〇Isaku Kanno¹, Yuichi Tsujiura¹, Fumiya Kurokawa¹, Hirotaka Hida¹ (1.Kobe Univ.)

Keywords:ferroelectric,thin film,piezoelectric

Piezoelectric materials have been started in MEMS because of their large electro-mechanical conversion properties even in micro-scale. The technologies particular to piezoelectric MEMS are not only deposition of piezoelectric thin films but piezoelectric measurement of thin films. We have studied the measurement methods of direct and converse piezoelectric effects of thin films by using a unimorph cantilever of a piezoelectric thin film on a substrate. In this talk, I would introduce the characteristics of piezoelectric properties of thin films.