The 63rd JSAP Spring Meeting, 2016

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[21a-H103-1~10] 6.4 Thin films and New materials

Mon. Mar 21, 2016 9:00 AM - 11:45 AM H103 (H)

Motofumi Suzuki(Kyoto Univ)

10:15 AM - 10:30 AM

△ [21a-H103-5] Solid-phase crystallization of amorphous molybdenum oxide thin films via post-annealing under uniaxial compression

〇Ryotaro Nanba1, Yasuhisa Nozawa1, Geng Tan1, Nobuo Tsuchimine2, Satoru Kaneko3,1, Akifumi Matsuda1, Mamoru Yoshimoto1 (1.Tokyo Tech., 2.TOSHIMA Manu. Co., Ltd, 3.Kanagawa Ind. Tech. Center)

Keywords:Molybdenum Oxide,Solid Phase Crystallization,Thermal Nanoimprint