[21a-H135-1~13] 3.2 Equipment optics and materials

[21a-H135-7] Development of a Scatterometer of Gonio-STAR GEM Ⅵ

〇Etsuo Kawate¹ (1.TRAS Inc.)

Keywords:scatterometer,space light distribution,reflectance

Rays radiated in all directions from a focus of an ellipsoid mirror converge on the other focus. But rays radiated from a point near a focus get close to or away from the other focus depending on the reflection positions on the mirror. Thus the ellipsoid mirror with a large numerical aperture cannot collect the rays, so that a scatterometer using an ellipsoidal mirror has not been developed. Our company succeeds in solving these problems and in developing a scatterometer of a Gonio-STAR GEM using two equivalent ellipsoidal mirrors. This device makes striking progress in the measurement of space light distribution radiated diffusely from a sample.