The 63rd JSAP Spring Meeting, 2016

Presentation information

Poster presentation

16 Amorphous and Microcrystalline Materials » 16 Amorphous and Microcrystalline Materials(Poster)

[21a-P8-1~27] 16 Amorphous and Microcrystalline Materials(Poster)

Mon. Mar 21, 2016 9:30 AM - 11:30 AM P8 (Gymnasium)

9:30 AM - 11:30 AM

[21a-P8-24] ITO sputtering damage to Cat-CVD amorphous silicon passivation films

Takeo Konishi1, Keisuke Ohdaira1 (1.JAIST)

Keywords:sputtering,catalytic chemical vapor deposition,solar cell