9:30 AM - 11:30 AM
[21a-P8-25] Passivation ability of Cat-CVD SiNx films after high temperature annealing
Keywords:Cat-CVD
Presentation information
Poster presentation
16 Amorphous and Microcrystalline Materials » 16 Amorphous and Microcrystalline Materials（Poster）
[21a-P8-1~27] 16 Amorphous and Microcrystalline Materials（Poster）
Mon. Mar 21, 2016 9:30 AM - 11:30 AM P8 (Gymnasium)