Improvement of SiN<sub>x</sub>/c-Si interface quality by flash lamp annealing

Presentation information

Poster presentation

16 Amorphous and Microcrystalline Materials » 16 Amorphous and Microcrystalline Materials（Poster）

Mon. Mar 21, 2016 9:30 AM - 11:30 AM P8 (Gymnasium)

9:30 AM - 11:30 AM

〇Junichiro Miyaura¹, Keisuke Ohdaira¹ (1.JAIST)

Keywords:flash lamp annealing