[21a-P8-1~27] 16 Amorphous and Microcrystalline Materials（Poster）

[21a-P8-27] Effects of light soaking and thermal treatment on PECVD-SiN_x:H passivation for n-type Si surfaces

〇(PC)Takefumi Kamioka¹, Taisei Iwahashi¹, Hyunju Lee¹, Yuri Sato¹, Kyotaro Nakamura², Yoshio Ohshita¹ (1.TTI, 2.Meiji Univ.)

Keywords:Si solar cell,passivation,Si nitride