[21a-W321-1~12] 3.7 Laser processing

[21a-W321-6] Cu-Ni micropatterning by femtosecond laser reduction of CuO and NiO nanoparticles

〇Mizue Mizoshiri¹, Junpei Sakurai¹, Seiichi Hata¹ (1.Nagoya Univ.)

Keywords:femtosecond laser,microprocessing,reductive sintering

Cu-Ni micropatterns were fabricated by femtosecond laser reduction of CuO and NiO nanoparticles. First, CuO and NiO nanoparticles mixed with a reductant agent of ethylene glycol were spin-coated on a glass substrate. Then, femtosecond laser pulses were focused onto the surface of the solution film to form micropatterns. The pulse energy was 0.54 nJ. The laser scan speed were varied from 1 to 20 mm/s. XRD spectra of the micropatterns exhibited that CuNi micropatterns were formed at the scan speed of 20 mm/s. The fabricated micropatterns were conductive. On the other hand, NiO and CuO were generated at the lower laser scan speed. These results suggested that the reduced micropatterns were re-oxidized by overheating. We will report on the details such as electrical conductivity of the micropatterns.