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[21a-W351-3] Si3N4 / EO polymer MZI modulator
Keywords:electro-optic effect,modulator
Recently, hybrid optical waveguide modulators, such as silicon / EO polymer, have been investigated activity for the on-chip optical modulator. In this work, we fabricated Si3N4 / EO polymer Mach-Zhender interference modulator and demonstrated. We measured optical modulation property with a half-wave viltage figure of merit of 4.4 Vcm at 1550 nm.