Investigation of Pulse Modulation Effect in Microwave Excited Bubble Plasma

Presentation information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

Mon. Mar 21, 2016 9:00 AM - 12:00 PM W611 (W6)

Naoki Shirai(Tokyo Metropolitan Univ.), Tatsuya Misawa(Saga Univ.)

11:45 AM - 12:00 PM

〇(M1)TAKUYA KITANO¹, TAKUYA ITO¹, HIROAKI SUZUKI¹, TATSUO ISHIJIMA¹, YASUNORI TANAKA¹, YOSHIHIKO UESUGI¹ (1.Kanazawa Univ.)

Keywords:microwave plasma,photoresist removing,minimal