The 63rd JSAP Spring Meeting, 2016

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[21a-W641-1~12] 6.1 Ferroelectric thin films

Mon. Mar 21, 2016 9:00 AM - 12:15 PM W641 (W6)

Tomoaki Yamada(Nagoya Univ.), Yoshiomi Hiranaga(Tohoku Univ.)

10:15 AM - 10:30 AM

[21a-W641-6] Chemical solution-derived Pb(Zr,Ti)O3 Films for Pizeo-MEMS devices

MASAMI KAWAHARA1, SEUNG-HYUN KIM2 (1.Kojundo chemical lab., 2.Brown Univ.)

Keywords:PZT,Sol-gel,MEMS

Piezoelectric materials have been key components of high precision sensors, actuators and ultrasonic probes which play an important role in the maintenance of many critical industrial processes. Among ferroelectric family, PZT films are considered as one of most promising candidates for microelectromechanical system (MEMS) applications since they can produce high mechanical strain under the stringent control of several key process parameters.
The chemical solution deposition (CSD) method is effectable techniques for PZT thin films. We developed high quality PZT chemical solutions that provides high purity, accurate composition control, and is cost effective as well as scalable.
Here, we introduce new high yield chemical coating solutions for high quality PZT films and piezo-MEMS device applications in detail and also describe the property relationships and possible applications according to the composition of the films using these unique solutions.