[21p-H116-1~22] 3.8 Optical measurement, instrumentation, and sensor

[21p-H116-1] Wide-field Heterodyne Interferometric Technique for 2D Surface Vibration Measurement

〇Samuel Choi^1,4, Yuta Maruyama², Takamasa Suzuki², Kourakata Itaru³ (1.Department of Electrical and Electronics Engineering, Niigata Univ., 2.Graduate School of Science and Technology, Niigata Univ., 3.Inst. for research collaboration, Niigata Univ., 4.AMED-CREST, AMED)

Keywords:Vibrometry,Full-field measurement,Heterodyne itnerferometer

Wide-field heterodyne interferometric vibrometry has been developed for measuring 2D-surface vibration with frequency range of KHz. Vibration measurements using CCD image sensor with 30 fps were conducted to perform imaging of amplitude and phase distribution of a vapor deposited film vibrated with a frequency of 9 KHz. Detailed method and measurement error of out technique will be discussed.