[21p-H116-1~22] 3.8 Optical measurement, instrumentation, and sensor

[21p-H116-6] Polarized illumination for three-dimensional shape measurement by tilt-ellipsometry

Hiroki Ogawa¹, 〇Toshihide Tsuru¹ (1.Yamagata Univ.)

Keywords:ellipsometry,shape measurement

When the glossy objects is illuminated by unpolarized light or circularly polarized light, the slope and azimuthal angles of surface normal vector could be derived by determining the parameters of the reflected polarization states. The 3D shape can be reconstructed using the normal vector of the reflection surface. Reflection polarization maps measured under unpolarized or right circular polarization illuminations of a 3D object are reported.