[21p-H116-1~22] 3.8 Optical measurement, instrumentation, and sensor

[21p-H116-7] Utilization of Super-continuum and Multi-wavelength Back-propagation Interferometer for High-resolution Tomography

〇Kazuki Abe¹, Yuya Takekuma¹, Samuel Choi², Osami Sasaki², Isami Nitta¹, Itaru Kourakata³ (1.Graduate School of Science and Technology Niigata Univ., 2.Department of Electrical and Electronics Engineering, Niigata Univ., 3.Inst. for Research Collaboration, Niigata Univ.)

Keywords:Interferometry,Tomography,printable electronics

As an effective inspection equipment of functional films for printable electronics, a spectral interferometer utilizing the multi-wavelength back-propagation (MWB) method and supercontinuum light source (SC) has been developed. Precision tomographic measurements with a resolution less than 1 micro meter can be performed by adopting MWB. Surface profile and displacement of a plane mirror was obtained by using visible region of SC with sub-micron accuracy.