The 63rd JSAP Spring Meeting, 2016

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[21p-H137-1~22] 7.2 Applications and technologies of electron beams

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H137 (H)

Yoichiro Neo(Shizuoka Univ.), Hitoshi Nakahara(Nagoya Univ.), Yasuhito Gotoh(Kyoto Univ.)

4:15 PM - 4:30 PM

△ [21p-H137-12] Measurement system for evaluating angular distribution of secondary electrons from a rench bottom

〇Hyejin Kim1, Daisuke Bizen1, Michio Hatano1 (1.Hitachi, Ltd. CRL)

Keywords:secondary electron,angular distribution