4:15 PM - 4:30 PM
△ [21p-H137-12] Measurement system for evaluating angular distribution of secondary electrons from a rench bottom
Keywords:secondary electron,angular distribution
Oral presentation
7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams
Mon. Mar 21, 2016 1:15 PM - 7:00 PM H137 (H)
Yoichiro Neo(Shizuoka Univ.), Hitoshi Nakahara(Nagoya Univ.), Yasuhito Gotoh(Kyoto Univ.)
4:15 PM - 4:30 PM
Keywords:secondary electron,angular distribution