[21p-P11-1~11] 15.8 Crystal evaluation, impurities and crystal defects

[21p-P11-10] Evaluation of GaN wafer for power devices by Raman spectroscopy (6)

〇Kazuya Agui¹, Hidekazu Yamamoto¹ (1.Chiba Inst.of Tech.)

Keywords:GaN on GaN