The 63rd JSAP Spring Meeting, 2016

Presentation information

Print

Poster presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[21p-P15-1~23] 3.8 Optical measurement, instrumentation, and sensor

Mon. Mar 21, 2016 4:00 PM - 6:00 PM P15 (Gymnasium)

4:00 PM - 6:00 PM

[21p-P15-3] Development of imaging ellipsometer with high resolution

〇Lianhua Jin1, Kazuo Sano2, Isao Fujio2, Makoto Uehara2 (1.Univ. of Yamanashi, 2.Mejiro Genossen Inc)

Keywords:Imaging ellipsometer