The 63rd JSAP Spring Meeting, 2016

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Poster presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[21p-P9-1~9] 15.5 Group IV crystals and alloys

Mon. Mar 21, 2016 1:30 PM - 3:30 PM P9 (Gymnasium)

1:30 PM - 3:30 PM

[21p-P9-5] Fabrication of Uniaxially Strained SiGe-on-Insulator (SGOI) via Wafer Bonding

〇(M2)Takuya Matsuo1, Kentarou Sawano1 (1.Tokyo City Univ.)

Keywords:semiconductor,Via Wafer Bonding