Thermal stability improvement of Pt ultrathin-film hydrogen sensor using TiN

Presentation information

Oral presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.3 Novel technologies and interdisciplinary engineering

Mon. Mar 21, 2016 1:45 PM - 4:15 PM S322 (S3)

3:45 PM - 4:00 PM

〇Shota Inami¹, Ryo Furukawa², Kenji Sakai¹, Toshihiko Kiwa¹, Keiji Tsukada¹ (1.Graduate School, Okayama Univ., 2.Okayama Univ.)

Keywords:hydrogen sensor