[21p-S421-1~20] 17.1 Carbon nanotubes & other nanocarbon materials

[21p-S421-14] Diameter and crystal quality dependent electrical properties of carbon nanotube (2)

〇Ken Nishiura¹, Junichiro Tokutomi¹, Masashi Tanaka², Ryo Matsumoto², Yoshihiko Takano² (1.Yazaki Corp., 2.NIMS)

Keywords:Carbon Nanotube,Electrical Conductivity

Electrical properties of individual multi-walled carbon nanotubes (MWCNT) on Si/SiO₂ substrate were investigated. Au/Ti electrodes were fabricated by electron beam lithography method. Electrical conductivity was measured by 4-terminal method in low temperature probing system. Conductivity was improved with increase in crystal quality of MWCNT. Furthermore, temperature coefficient of conductivity was significantly different.