The 63rd JSAP Spring Meeting, 2016

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Oral presentation

CS Code-sharing session » CS.2 3.7/12.6/12.7 Code-sharing session

[21p-W331-1~19] CS.2 3.7/12.6/12.7 Code-sharing session

Mon. Mar 21, 2016 1:45 PM - 7:00 PM W331 (W2・W3)

Hiroaki Takehara(NAIST), Yoichiroh Hosokawa(NAIST), Atsushi Miura(Hokkaido Univ.)

3:00 PM - 3:15 PM

[21p-W331-6] Micromachining of PDMS for microfluidics using laser produced plasma EUV radiation

〇Hikari Urai1, Mizuki Ogawa1, Shintaro Fukami1, Shuichi Torii1, Tetsuya Makimura1, Daisuke Nakamura2, Akihiko Takahashi2, Tatsuo Okada2, Hiroyuki Niino3 (1.Univ. of Tsukuba, 2.Kyushu Univ., 3.AIST)

Keywords:EUV,polydimethylsiloxane,micromachining