[22a-P4-1~27] 6.3 Oxide electronics

[22a-P4-12] Growth of bismuth oxide by atomic layer deposition

〇Mitsuhiro Hirabayashi¹, Yu Tanaka¹, Syuhei Komatsu¹ (1.Sophia Univ.)

Keywords:thin film,bismuth oxide,atomic layer deposition

Among bismuth oxide, Bi₂O₃ has optical, electrical, piezoelectric properties and oxide ion conductivity, so it is applicable to various techniques. In this study, we grew bismuth oxide thin films by atomic layer deposition which has advantages of controlling film thickness, morphology and the chemical composition, and characterization of them was carried out.