The 63rd JSAP Spring Meeting, 2016

Presentation information

Poster presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[22a-P6-1~19] 15.4 III-V-group nitride crystals

Tue. Mar 22, 2016 9:30 AM - 11:30 AM P6 (Gymnasium)

9:30 AM - 11:30 AM

[22a-P6-6] Studies on the effects of ambient gas species on the MOVPE of BGaN thin films

Takumi Nakamura1, Yudai Yano1, Kohei Ueyama1, Toru Aoki2, Yoku Inoue1, Kazunobu Kojima3, Sigefusa Chichibu3, Takayuki Nakano1 (1.Shizuoka Univ., 2.RIE Shizuoka Univ., 3.IMRAM Tohoku Univ.)

Keywords:BGaN,MOVPE