[22a-P6-1~19] 15.4 III-V-group nitride crystals

[22a-P6-6] Studies on the effects of ambient gas species on the MOVPE of BGaN thin films

〇Takumi Nakamura¹, Yudai Yano¹, Kohei Ueyama¹, Toru Aoki², Yoku Inoue¹, Kazunobu Kojima³, Sigefusa Chichibu³, Takayuki Nakano¹ (1.Shizuoka Univ., 2.RIE Shizuoka Univ., 3.IMRAM Tohoku Univ.)

Keywords:BGaN,MOVPE