[22a-S011-1~16] 17.2 Graphene

▲ [22a-S011-6] Influence of Cu crystallographic orientations on graphene anisotropic etching

〇(D)Kamal Prasad Sharma, Golap Kalita¹, Masaki Tanemura¹ (1.Nagoya Inst. Technol.)

Keywords:Graphene,LP-CVD,Anisotropic etching

Etching process has been established as an important tool to understand the growth of graphene and other 2D materials; as well as enabling fabrication of various well-defined structures. Here, we reveal the influence of Cu crystallographic orientation on graphene anisotropic etching process. Microscopic analysis showed different shape and size of graphene crystals with dissimilar nucleation within closure vicinity of neighboring Cu grains on the basis of Crystallograpic orientaions of Cu with dissimilar anisotropic etching.