[22a-S421-1~11] 17.3 Layered materials

[22a-S421-3] Growth process of a h-BN film by diffusion and precipitation

〇Satoru Suzuki¹, Yui Ogawa¹, Shengnan Wang¹, Hideki Yamamoto¹ (1.NTT Basic Res. Labs.)

Keywords:h-BN,SEM,Auger electron spectroscopy

We have proposed the diffusion and precipitation method for multi-h-BN growth. Here, we report experimantal observations of the growth process.