The 63rd JSAP Spring Meeting, 2016

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Oral presentation

17 Nanocarbon Technology » 17.3 Layered materials

[22a-S421-1~11] 17.3 Layered materials

Tue. Mar 22, 2016 9:00 AM - 12:00 PM S421 (S4)

Yasumitsu Miyata(Tokyo Metropolitan Univ.)

11:15 AM - 11:30 AM

[22a-S421-9] Challenge to the fabrication of molybdenum disulfide (MoS2) layer film by mist CVD

〇(M1)Shota Sato1, Toshiyuki Kawaharamura1,2 (1.Kochi Univ. of Technol., Intelligent Mech. Sys. Eng., 2.Kochi Univ. of Technol., Res. Inst.)

Keywords:MoS2,Mist CVD

低環境負荷な薄膜作製手法である「ミストCVD」により，二次元材料「MoS2」を基板上に直接作製したので報告する。