12:00 PM - 12:15 PM
[22a-W331-12] Reduction in the defect density of FLA-poly-Si films by controlling the quality of precursor a-Si films
Keywords:Flash Lamp Annealing
Presentation information
Oral presentation
16 Amorphous and Microcrystalline Materials » 16.1 Fundamental properties, evaluation, process and devices in disordered materials
[22a-W331-1~12] 16.1 Fundamental properties, evaluation, process and devices in disordered materials
Tue. Mar 22, 2016 9:00 AM - 12:15 PM W331 (W2・W3)
Nobuaki Terakado(Tohoku Univ.), Tsuyoshi Honma(Nagaoka Univ. of Tech.)