9:45 AM - 10:00 AM
[22a-W541-4] Investigation of Thermal Oxidation Process in Low-defect Density GaN Substrate
Keywords:GaN,Thermal oxidation
Oral presentation
13 Semiconductors » 13.8 Compound and power electron devices and process technology
Tue. Mar 22, 2016 9:00 AM - 11:45 AM W541 (W5)
Seiji Nakamura(TMU)
9:45 AM - 10:00 AM
Keywords:GaN,Thermal oxidation