The Surface Modification of Graphite Powders by Low-Temperature Plasma Fluorination

Presentation information

Oral presentation

8 Plasma Electronics » 8.3 Deposition of thin film and surface treatment

Tue. Mar 22, 2016 9:00 AM - 12:45 PM W611 (W6)

12:00 PM - 12:15 PM

〇Kohshi Taguchi¹, Yutaka Adachi¹, Masahiro Matsumoto¹, Kazuyuki Noborio¹ (1.Sakigake Semiconductor)

Keywords:graphite,fluorination,powder treatment