[22p-H103-1~8] 6.4 Thin films and New materials

[22p-H103-5] Preparation of TaO₂ thin films using NbO₂ template layers by a pulsed laser deposition

〇Yuji Muraoka^1,2, Fujimoto Yuki¹, Kameoka Misaki², Matsuura Yuka², Sunagawa Masanori¹, Terashima Kensei¹, Wakita Takanori¹, Yokoya Takayoshi^1,2 (1.Okayama Univ., 2.RLSS, Okayama Univ.)

Keywords:TaO2,NbO2,template layer

TaO₂ thin films were prepared using rutile-type NbO₂ template layers on Al₂O₃(0001) substrates by a pulsed laser deposition technique. The results from the XRD and XPS measurements suggest that the film is composed of epitaxially grown TaO₂ with an amorphous Ta₂O₅ surface layer. Our work presents the effectiveness of the NbO₂ template layers for the formation of TaO₂ thin films.