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[22p-H103-5] Preparation of TaO2 thin films using NbO2 template layers by a pulsed laser deposition
Keywords:TaO2,NbO2,template layer
TaO2 thin films were prepared using rutile-type NbO2 template layers on Al2O3(0001) substrates by a pulsed laser deposition technique. The results from the XRD and XPS measurements suggest that the film is composed of epitaxially grown TaO2 with an amorphous Ta2O5 surface layer. Our work presents the effectiveness of the NbO2 template layers for the formation of TaO2 thin films.